光刻机 Scanner

Manufacturer: NIKON

Model: NSR S306

Wafer Size: 6-8″

Equipment Details:Scanner
Resolution: 0.12um

Manufacturer: NIKON

Model: NSR S205C

Equipment Details:KrF Scanner, 8″-12″
KrF lens: 248 nm
Reduction: 4:1
Resolution: 0.13um