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离子注入机 Ion Implanter

离子注入机 Ion Implanter

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EQUIPMENT

Spare parts (5)
- Cassette (1)
- Ceramic Arm (1)
- Ceramic Ring (1)
- Chuck (2)
光刻机 Scanner (4)
光刻机 Stepper (8)
刻蚀机 Etcher (2)
化学气相沉积机 CVD (0)
扩散炉 Diffusion Furnace (1)
扫描电镜 Electron Microscope (0)
涂胶显影机 Track (5)
- DNS (3)
- TEL (2)
湿法清洗机 Wet Station (0)
溅射台 Sputter (1)
物理气相沉积机 PVD (0)
离子注入机 Ion Implanter (0)
量测设备 Testing & Metrology (0)

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