光刻机 Stepper

Manufacturer: NIKON

Model: NSR 1505 G6E

Wafer Size: 4-6″

Equipment Details:Stepper
Resolution: 0.65um

Manufacturer: NIKON

Model: NSR 2205 EX14/ I14E2

Category: WAFER STEPPERS

Equipment Details:Stepper,6- 8″
Notch type
(2) Cassette elevators
Lamp uniformity: 1.5%
2.5kW UV Lamp

Resolution:0.35um

Manufacturer: NIKON

Model: NSR 2205 I12D

Category: WAFER STEPPERS

Wafer Size: 4-8″

Equipment Details:Wafer stepper
Resolution:0.4um